BROOKS High Frequency RFID Reader series Five antenna portsShort functionRS232 and/or Ethernet interfacesPower over Ethernet (PoE)The polling mode of each antenn
BROOKS Spartan sorter series The optimized micro environment provides stream cleanliness and performance better than ISO 1Dual, ultra-thin edge gripp
2023-01-17
BROOKS Light mask storage series Access times are shortened due to fast access to buffersOperators and AMHS can be accessed simultaneously through separa
2023-01-17
BROOKS Mask Manager Pro-S series Automated marking management and traceabilityIncreased uptime of scanner/lithography unitReduce the rework cost of marki
2023-01-17
BROOKS Cleaner Series 1900 Fully automatic EUV pod handlingISO 2 micro environmentESD and AMC control environmentN2/xCDA is cleared for each podPur
2023-01-17
BROOKS Standard Line Box D Double Series Suitable for a 6 mask with a thickness of 250mm or a 5 mask with a thickness of 90mmedgingDesigned for double layer film
2023-01-17
BROOKS Light Mask Box B Super Series edgingSmall light mask contactDifferent pin designs are providedSize 6 , 250mmStainless steel long life hinge
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