Operators and AMHS can be accessed simultaneously through separate manual and OHT loading ports

High storage density on the market

Automated marking management and traceability

Increased uptime of scanner/lithography unit

Reduce the rework cost of marking lines

Protect the mask from chemical contamination, haze and crystal growth

Increase exposure times to extend mask life

High memory density

Fully automatic mask processing

Reliable and safe handling reduces mask and film damage

Low cost of ownership (COO)